Page 19 - 21-工艺气体元件（特气阀）

ฏ঳ূຌ୳ႊ

ׂ೗ڇ܀ጀᅪ๚ၜw
๑ᆩമՂ܁ă

ยऺฉڦጀᅪ ๑ᆩ࣍ৣ
ጀᅪ ጀᅪ

!1ࠅ׬ࡗ୳৛܈ qڅ႐ޫ์ڦݳྷࢅׇ໯Ljᆯᇀޫ์ᆅഐՎ෥ࢅ֌ଙڦଝࣅă
ฏ঳ূຌ୳ႊڦࠅ׬ࡗ୳৛܈๟൶ݴᇱଙڦ૭܈ڦంఁڦఁ ᅃڋޫ์LjՍ฿ඁࡗ୳ഗڦࠀీă
׬ă(ᇑୁ༹ୁࡗ้ڦࡗ୳৛܈๟փཞڦ)߳ࠅ׬ࡗ୳৛܈ڦ੣ഘ
wሞᆶናۯࢅ؋ऍڦׇ໯๑ᆩLjׂࣷิೃહ೦࣋ăᄲ֑ൽ
त຤ዐLj੗أඁ95%ڦ૭ጱ০ፕྺ֖੊՗๖ሞူ՗ă ๢ړڦሺഽٯแም๑ᆩă
ࠅ׬ࡗ୳৛܈ࢅأඁ95%૭ጱ০(֖੊ኵ)
ࠅ׬ أඁ95%ڦ૭ጱ০(μm)
ࡗ୳৛܈ ୁ༹;੣ഘ ୁ༹;຤
(μm) ൞ཟ(BC) փႮߒ(SUS) ൞ཟ(BC) փႮߒ(SUS) ԍ࠶ݛ݆
120 lj lj 244 110 ጀᅪ
100 lj lj 177 87
70 lj lj 104 66 qԍ࠶዁ཚ׉๪ా๑ᆩྺኹLjփᄲధ؜Ԉጎă
40 3.6 2.5 90 45
ଷྔLjփᄲݣዃሞᇜڟ຤ڦׇ໯Ąᆶโഘڦׇ໯Ąߛ࿒ڦׇ໯ăࣷׯ
20 2.8 2 59 31
ྺՎ෥ࢅޫ์ڦᇱᅺă
10 2.1 1.5 32 20
5 1.5 1.1 20 15 wׂ೗ฉփᄲݣዃ࿿༹ă
2 1 0.7 17 10 ኄࣷׯྺՎႚࢅ೦໦ڦᇱᅺă

Ҿጎ
ྼࢺۅॠ
ጀᅪ
ጀᅪ
qټথཀྵՔጚ೗ڦҾጎݛ݆
1) ૶থஅ࿖M3ڦׇࢇ qߵ਍๑ᆩཉॲLjუ૰໦฿ŗPᆶՎۯă
๮ౣࢫLj๑ᆩথཀྵڦୃঙ௬ᆩ๢ړڦӮ๮Ljሺౣሀ1/4ංă ŗP๟՗๖୳ႊ༬Ⴀڦᅺ໎ኮᅃLjඓۨ࠶૙एጚࢫ๑ᆩă
ESKA-Z2701-ŕᆩ๮ౣ৊ႜăฏ঳༹ևݴփႹᆩӮ๮ڪౣ෇ă wᄺᄲ֖੊ժ૙঴ഄ໲ׂ೗߳ጲڦԍኤत௨ሴ๚ၜڦएإ
2) ૶থஅ࿖M5ڦׇࢇ ฉም๑ᆩă
๮ౣࢫLj๑ᆩথཀྵڦୃঙ௬ᆩ๢ړڦӮ๮Ljሺౣሀ1/6ංă ฏ঳ূຌڦׇࢇLjᆯᇀ๑ᆩࢫڦׂ೗ڦՎ෥Ă੥ᄅፆ෗Ljࡗ୳
ESKA-Z2702-ŕᆩ๮ౣ৊ႜăฏ঳༹ևݴփႹᆩӮ๮ڪౣ෇ă ႠీইگLjन๑ሞԍኤ೺क़ాLjᄺࣷՎׯׂ೗ԍኤڦ๢ᆩݔྷ
3) ૶থஅ࿖R(࠶ᆩጔஅ࿖)ڦׇࢇ ኮྔă
๮ౣࢫLj๑ᆩথཀྵڦୃঙ௬Ljᆩ๢ړڦӮ๮ሺౣă

૶থஅ࿖ ๢ࢇ৆ࠦ૰ਈ NĄm
R1/8 7~9 ř
R1/4 12~14
R3/8 22~24
R1/2 28~30
řESKA-Z2801-ŕᆩ๮ౣ৊ႜăฏ঳༹ևݴփႹ
ᆩӮ๮ڪౣ෇ă

854