Page 6 - 21-工艺气体元件(特气阀)
P. 6

ฏ঳ূຌ୳ႊׂ೗ႚጒ

           ႚጒ                  ൞ཟ(BC୳ႊ)                               փႮߒ(SUS୳ႊ)

                           t                                       t
           ᇶӱ                      EBDဣଚ    Ąྔ০ൎၥे߾೗                       ESDဣଚ    Ąྔ০ൎၥे߾೗
          (ᇶಎ)            øD       (P.844)  Ą࿮ྔ০े߾೗               øD        (P.847)  Ą࿮ྔ০े߾೗



                      L      t                                L      t
          ਈႚӱ                      EBSဣଚ    Ąྔ০२ൎൎ܏೗                       ESSဣଚ    Ąྔႚ२ൎൎ܏೗
          (ԋӱ)             W       (P.844)  Ąྔႚऐႁे߾೗               W        (P.848)  Ąྔႚऐႁे߾೗

                                                                    L
                                                                øD
                           L
                                   EBPဣଚ                                   ESPဣଚ    Ą࿮ފ೗(ׯႚ)
           ᇶཤ                                    lj                  t
                       øD          (P.845)                    භࡰ     භࡰ     (P.849)  Ąᆶފ೗(භࡰ)
                         t
                                                          භࡰ
                                                                    L
                           L                                    øD
                            t
         ᇶཤټڹ                     EBWဣଚ          lj                  t       ESWဣଚ   Ą࿮ފ೗(ׯႚ)
                       øD          (P.845)                    භࡰ     භࡰ     (P.850)  Ąᆶފ೗(භࡰ)

                                                          භࡰ       භࡰ
                           L
                            t1
         ټཫᇹڦ                      EBFဣଚ
           ጔႚ          øD1     øD2  (P.846)      lj              lj            lj            lj
                          t2

                                                                                                   FGD
                                                                A
                                                                                                   FGE
                                                                       B
                       A                                                                           FGG
                                                                A
                            B                                                                      FGA
                                                                     B
                  ୃঙܾ௬੻C                   Ąټথཀྵ            ୃঙܾ௬੻C                   Ąټথཀྵ           FGB
          ټথཀྵ                       P.846    (M3ĄM5ĄR1/8Ą                   P.851     (M3ĄM5Ą
           ୳ႊ                                 R1/4ĄR3/8Ą        A                     R1/8ĄR1/4Ą   FGC
                       A                      R1/2)                                   R3/8ĄR1/2)
                                                                                                   FGF
                                                                       B
                              B
                                                                                                   FGH
                                                                ୃঙܾ௬੻C
                         ୃঙܾ௬੻C
                                                                A                                  EJ
                                                                       B                           ED
                                                                                                   FQ1
                  ฏ঳༹֌ዊ;၎ړCAC403                          ฏ঳༹֌ዊ;၎ړSUS316L
           ༬׊     (ټথཀྵ୳ႊڦূຌև֌ዊ;ࣜཟ)                        (ټথཀྵ୳ႊڦূຌև֌ዊ;փႮߒ)                        FN
                  Ąሞٷഘዐ2CuCO3ĄCu(OH)2(୴ઢ)ᆶႚׯଆࡻڦఱ์Ⴀă       Ąӎ๧༹ဣփႮߒܔ໗ĄॢĄࣅბ೗ᆶଆࡻڦఱ์Ⴀă
                                                                                                   EB□
                                                                                                   ES□
                                                                                              841
   1   2   3   4   5   6   7   8   9   10   11