Page 8 - 21-工艺气体元件（特气阀）

SMCฏ঳ূຌ୳ႊ

ୁଉ༬Ⴀ

൞ཟ(BC) ୳ႊࢩ܈! 3mm ୳ႊࢩ܈! 3mm
࿒܈! 20ņ ࿒܈! 20ņ
ୁ༹;੣ഘ ቕႠ୲! 1.8ġ10 lj5 PaĄs ୁ༹;຤ ቕႠ୲! 1ġ10 lj3 PaĄs
10 ࠅ׬2μm 100 ࠅ׬1μm
ࠅ׬1μm ࠅ׬2μm ࠅ׬10μm ࠅ׬20μm
ࠅ׬5μm ࠅ׬5μm ࠅ׬40μm

ࠅ׬10μm ࠅ׬70μm ࠅ׬100μm
1 ࠅ׬20μm 10 ࠅ׬120μm
უ૰ই!!ŗP kPa ࠅ׬40μm უ૰ই!!ŗP kPa

ࠅ׬70μm
ࠅ׬100μm
0.1 1
ࠅ׬120μm

0.01 0.1
0.1 1 10 0.1 1 10
௅ڇ࿋௬ओڦୁଉ!!�/min(ANR)/cm 2 ௅ڇ࿋௬ओڦୁଉ!!�/min/cm 2
փႮߒ(SUS) ୳ႊࢩ܈! 2.3mm ୳ႊࢩ܈! 2.3mm
࿒܈! 20ņ ࿒܈! 20ņ
ୁ༹;੣ഘ ቕႠ୲! 1.8ġ10 lj5 PaĄs ୁ༹;຤ ቕႠ୲! 1ġ10 lj3 PaĄs
100 1000 ࠅ׬2μm
ࠅ׬1μm ࠅ׬5μm
ࠅ׬10μm
ࠅ׬1μm
ࠅ׬2μm ࠅ׬20μm
10 ࠅ׬5μm 100 ࠅ׬40μm
ࠅ׬70μm
უ૰ই!!ŗP kPa ࠅ׬10μm უ૰ই!!ŗP kPa ࠅ׬120μm FGD
ࠅ׬100μm
ࠅ׬20μm
FGE
ࠅ׬70μm
1 ࠅ׬40μm 10 FGG
ࠅ׬100μm
ࠅ׬120μm FGA
FGB

0.1 1 FGC
0.1 1 10 0.1 1 10
௅ڇ࿋௬ओڦୁଉ!!�/min(ANR)/cm 2 ௅ڇ࿋௬ओڦୁଉ!!�/min/cm 2
ጀ)փႮߒ୳ႊڦୁଉ༬ႠLjø120mmᅜူڦESDĂ࿮ފڦESPĄESWڦׇࢇLjኵ๟փཞڦă FGF
Ğუ૰ইူڦ०ᅟऺ໙๕ğ FGH
ྜඇഘ༹ڦጒༀݛײ๕(PV/T=ᅃۨ)तუ૰ই๟ᇑ୳ႊڦࢩ܈ࢅቕ܈ׯԲ૩Ljᇑୁଉ༬Ⴀ཮փཞڦ๑ᆩཉॲڦუ૰ই੗०ᅟڦӀᅜူ໯๖൱؜ăፕྺٷዂኵ๑
ᆩă
(1) ๑ᆩୁ༹๟੣ഘLj࿒܈ T1ņĂेუူ P1 kPa้๑ᆩڦׇࢇڦუ૰ই!!ŗP kPa EJ
101.3ġŗP0ġ(273LJT1) ŗP0:ୁଉ༬Ⴀ཮൱ڥڦუ૰ই!!kPa
ŗP= ED
293ġ(P1LJ101.3)
(2) ๑ᆩୁ༹๟੣ഘई຤Lj୳ႊڦࢩ܈ྺ t1mmLjᇑୁଉ༬Ⴀ཮ڦ୳ႊࢩ܈๟փཞ้ڦუ૰ই!!ŗP kPa
t1 ŗP0:ᆯୁଉ༬Ⴀ཮൱ڥڦუ૰ইईᆯ(1)൱ڥڦუ૰ই!!kPa FQ1
ŗP=ŗP0ġ
t0(2.3ई3) t0:ୁଉ༬Ⴀ཮ڦ୳ႊࢩ܈(BC୳ႊ=3mm/SUS୳ႊ=2.3mm)
(3) ๑ᆩୁ༹ڦቕ܈η 1 (੣ഘई຤๟փཞ)ڦუ૰ই ŗP kPa FN
η 1 ŗP0:ᆯୁଉ༬Ⴀ཮൱ڥڦუ૰ই!!kPa
ŗP=ŗP0ġ
η 0 η 1:๑ᆩୁ༹ڦቕႠ୲ PaĄs EB□
η 0:ୁଉ༬Ⴀ཮ڦቕႠ୲(੣ഘ=1.8ġ10 lj5 PaĄs ຤=1ġ10 lj3 PaĄs) ES□
843